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Fabrications of High-dielectric Plate Having Deep Trenches and its Application to Electrostatic Generator for Vibration Energy Harvesting.
Masato Suzuki
Tomokazu Takahashi
J. Onishi
T. Wada
Seiji Aoyagi
T. Nishida
Y. Yoshikawa
Published in:
ICETET (2012)
Keyphrases
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