Micromachined planar inductors on silicon wafers for MEMS applications.

Chong H. Ahn Mark G. Allen

Published in: IEEE Trans. Ind. Electron. (1998)

Keyphrases

gallium arsenide
integrated circuit
semiconductor manufacturing
low cost
high density
high speed
neural network
planar surfaces
planar graphs
digital camera
low power
wavelet transform
single point
optical flow
liquid crystal
semiconductor devices
metal oxide semiconductor
multiscale