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22FD-SOI Variability Improvement Thanks to SmartCut Thickness Control at Atomic Scale.
Walter Schwarzenbach
L. Loubriat
Vincent Joseph
Laurent Viravaux
Olivier Moreau
Sebastien Lasserre
Bich-Yen Nguyen
Published in:
ESSDERC (2019)
Keyphrases
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optimal control
real time
control system
control strategy
robot control
data sets
social networks
case study
significant improvement
learning algorithm
website
image sequences
scale invariant
control problems