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Application of advnced process control on mixed-product chemical mechanical polishing process.
Chien-Feng Wu
Chcng-Hsicn Chen
Mui-Home Chen
Cheng-Wenc Chen
Published in:
EMEIT (2011)
Keyphrases
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process control
product quality
manufacturing process
control system
control charts
intelligent control
data mining
expert systems
life cycle
semiconductor manufacturing
data sets
quality control
application specific
conceptual design
product design
product development