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Modeling the Interactions Among Neighboring Nanostructures for Local Feature Characterization and Defect Detection.

Lijuan XuQiang Huang
Published in: IEEE Trans Autom. Sci. Eng. (2012)
Keyphrases
  • defect detection
  • feature interactions
  • automated visual inspection
  • boundary conditions
  • three dimensional
  • support vector
  • search algorithm
  • feature vectors
  • collaborative learning
  • modeling method
  • human interactions