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AMHS factors enabling small wafer lot manufacturing in semiconductor wafer fabs.
Jesus A. Jimenez
Alexander Grosser
Charitha Adikaram
Victoria Davila
Robert Wright
Michael Bell
Published in:
WSC (2010)
Keyphrases
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semiconductor manufacturing
wafer fabrication
process control
production system
factors affecting
manufacturing process
factors that influence
key factors
integrated circuit
data sets
small number
database
parallel computing
massively parallel
information technology
clustering algorithm
website
computer vision