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Dry And Wet Etching With (111) Silicon For High-Performance Micro And Nano Systems.

Dong-Il ChoByoung-Doo ChoiSangwoo LeeSeung Joon PaikSangjun ParkJaehong ParkYonghwa ParkJongpal KimIl-Woo Jung
Published in: Int. J. Comput. Eng. Sci. (2003)
Keyphrases
  • management system
  • retrieval systems
  • expert systems
  • high speed
  • computing systems
  • scientific computing
  • neural network
  • data mining
  • distributed systems
  • intelligent systems
  • complex systems
  • plasma etching