Login / Signup
Effect of frequency in the 3D integration of a PZT-actuated MEMS switch using a single crystal silicon asymmetric beam.
Fumihiko Nakazawa
Takeaki Shimanouchi
Tadashi Nakatani
Takashi Katsuki
Hisao Okuda
Osamu Toyoda
Satoshi Ueda
Published in:
3DIC (2011)
Keyphrases
</>
database systems
high speed
database
low cost
high density
low frequency