Hisao Okuda

Publication Activity (10 Years)

Years Active: 2011-2011
Publications (10 Years): 0

Publications

Fumihiko Nakazawa, Takeaki Shimanouchi, Tadashi Nakatani, Takashi Katsuki, Hisao Okuda, Osamu Toyoda, Satoshi Ueda
Effect of frequency in the 3D integration of a PZT-actuated MEMS switch using a single crystal silicon asymmetric beam. 3DIC (2011)