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Block copolymer directed self-assembly (DSA) aware contact layer optimization for 10 nm 1D standard cell library.

Yuelin DuDaifeng GuoMartin D. F. WongHe YiH.-S. Philip WongHongbo ZhangQiang Ma
Published in: ICCAD (2013)
Keyphrases
  • multi layer
  • global optimization
  • optimization process
  • optimization algorithm
  • optimization method
  • optimization methods
  • discrete optimization
  • optimization problems
  • high throughput
  • constrained optimization