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Online Rescheduling in Semiconductor Manufacturing.
Masao Sugi
Mingang Cheng
Masashi Yamamoto
Hiroki Ito
Kazuyoshi Inoue
Jun Ota
Published in:
Int. J. Autom. Technol. (2010)
Keyphrases
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semiconductor manufacturing
process control
discrete event simulation
online learning
real time
data structure
control system
production system
limited capacity
clustering algorithm
learning environment