Planning and Scheduling for Epitaxial Wafer Production Facilities.
Gabriel R. BitranDevanath TirupatiPublished in: Oper. Res. (1988)
Keyphrases
- production planning
- semiconductor manufacturing
- mixed integer programming model
- production planning and scheduling
- wafer fabrication
- scheduling problem
- scheduling algorithm
- production scheduling
- capacity planning
- manufacturing process
- integer programming
- shop floor
- planning process
- ai planning
- process control
- mixed initiative
- production cost
- response time
- decision support
- electrical properties
- thin film
- stochastic domains
- dynamic scheduling
- motion planning
- neural network
- knapsack problem
- capacity expansion
- preventive maintenance
- multistage
- batch processing
- facility location problem
- plan generation
- facility location
- infinite horizon
- domain independent
- planning horizon