Active cluster annotation for wafer map pattern classification in semiconductor manufacturing.
Jaewoong ShimSeokho KangSungzoon ChoPublished in: Expert Syst. Appl. (2021)
Keyphrases
- semiconductor manufacturing
- pattern classification
- discrete event simulation
- process control
- feature extraction
- pattern recognition
- production system
- clustering algorithm
- vowel recognition
- pattern classification problems
- decision boundary
- maximum a posteriori
- fuzzy classifier
- parzen window
- active learning
- nearest neighbor rule
- data sets
- probabilistic neural network
- discriminant embedding
- cluster analysis
- clustering method
- radial basis function neural network
- pairwise
- expert systems
- mass spectrometry data