Two-Stage Layout Decomposition for Hybrid E-Beam and Triple Patterning Lithography.

Xingquan Li Wenxing Zhu

Published in: ACM Trans. Design Autom. Electr. Syst. (2017)

Keyphrases

electron beam
electron beam lithography
integrated circuit
artificial intelligence
object recognition
database
decision trees
relational databases
evolutionary algorithm
x ray
hybrid learning
decomposition method