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Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS.

Bo WangShuji TanakaB. GuoG. VereeckeSimone SeveriAnn WitvrouwMartine WeversIngrid De Wolf
Published in: Microelectron. Reliab. (2011)
Keyphrases
  • thin film
  • high density
  • solar cell
  • fuzzy logic
  • high speed
  • empirical studies