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Validated 90nm CMOS Technology Platform with Low-k Copper Interconnects for Advanced System-on-Chip (SoC).

Thierry DevoivreM. LunenborgC. JulienJ.-P. CarrereP. FerreiraW. J. TorenA. VandeGoorP. GayetT. BergerO. HinsingerP. VannierY. TrouillerY. RodyP.-J. GoirandR. PallaI. ThomasF. GuyaderDavid RoyB. BorotNicolas PlanesSylvie NaudetF. PicoD. DucaF. LalanneD. HeslingaM. Haond
Published in: MTDT (2002)
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