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Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams.

Xiaohui DuYifang LiuAnlin LiZhou ZhouDaoheng SunLingyun Wang
Published in: Sensors (2016)
Keyphrases
  • data driven
  • sensor networks
  • real time
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  • low cost
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