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A Fast Process-Variation-Aware Mask Optimization Algorithm With a Novel Intensity Modeling.
Ahmed Awad
Atsushi Takahashi
Satoshi Tanaka
Chikaaki Kodama
Published in:
IEEE Trans. Very Large Scale Integr. Syst. (2017)
Keyphrases
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optimization algorithm
multi objective
optimization method
differential evolution
particle swarm optimization pso
evolutionary algorithm
hybrid optimization algorithm
objective function
process model
particle swarm optimisation
evolutionary multi objective
optimization strategy
artificial bee colony