Performance evaluation of the thin film area in an IC wafer fabrication system using Petri nets.

MuDer Jeng Chi Liang Chuang WenYuan Hung

Published in: SMC (1998)

Keyphrases

petri net
thin film
wafer fabrication
petri net model
manufacturing systems
discrete event systems
solar cell
high density
stochastic petri net
multi layer
ims ld
short circuit
room temperature
colored petri nets
service composition
white light interferometry
state machines
fuzzy petri net
fuzzy logic