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High-Density Integration of Multiple Independent Temperature-Controlled Micro Hotplates for MEMS Gas Sensors.

Zheng ZhangLiyang LuoYuanyuan LuoZhaohua ZhangChaoyang XingGuotao Duan
Published in: SENSORS (2023)
Keyphrases
  • high density
  • multiple independent
  • low density
  • chemical vapor deposition
  • close proximity
  • data center
  • thin film
  • sensor networks
  • multi class
  • bitstream
  • inverted file
  • magnetic tape
  • information retrieval systems