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Wafer fabrication: effects of metrology load port buffering in automated 300mm factories.
Robert Wright II
Marlin Shopbell
Kristin Rust
Silpa Sigireddy
Published in:
WSC (2002)
Keyphrases
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wafer fabrication
camera calibration
load balancing
semi automated
rms error
real time
computer vision
optimal solution
single view
process control