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Wafer fabrication: effects of metrology load port buffering in automated 300mm factories.

Robert Wright IIMarlin ShopbellKristin RustSilpa Sigireddy
Published in: WSC (2002)
Keyphrases
  • wafer fabrication
  • camera calibration
  • load balancing
  • semi automated
  • rms error
  • real time
  • computer vision
  • optimal solution
  • single view
  • process control