Exploratory analysis of the breakdown spots spatial distribution in metal gate/high-K/III-V stacks using functional summary statistics.
Enrique MirandaEamon O'ConnorPaul K. HurleyPublished in: Microelectron. Reliab. (2010)
Keyphrases
- spatial distribution
- exploratory analysis
- grain size
- summary statistics
- spatial information
- spatial distance
- information visualization
- data analysis
- data visualization
- real world
- relational databases
- data sources
- data mining techniques
- database management systems
- data sets
- high dimensional
- thin film
- data mining and knowledge discovery
- expert systems