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Modeling and Controller Design of a Precision Hybrid Scanner for Application in Large Measurement-Range Atomic Force Microscopy.

Jim-Wei WuKuan-Chia HuangMing-Li ChiangMei-Yung ChenLi-Chen Fu
Published in: IEEE Trans. Ind. Electron. (2014)
Keyphrases
  • controller design
  • atomic force microscopy
  • control scheme
  • control strategies
  • neural network
  • knowledge base
  • control system
  • fuzzy logic