Intelligent adaptive process control using dynamic deadband for semiconductor manufacturing.
Hyo-Heon KoJun-Seok KimJihyun KimJun-Geol BaekSung-Shick KimPublished in: Expert Syst. Appl. (2011)
Keyphrases
- process control
- semiconductor manufacturing
- intelligent control
- control system
- discrete event simulation
- product quality
- dynamically adjust
- manufacturing process
- adaptive systems
- intelligent systems
- adaptive learning
- production system
- neural network
- dynamic environments
- decision support
- fuzzy logic
- case study
- e learning
- decision making
- genetic algorithm