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Design, fabrication and characterization of a single-layer out-of-plane electrothermal actuator for a MEMS XYZ stage.

Yong-Sik KimNicholas G. DagalakisSatyandra K. Gupta
Published in: PerMIS (2012)
Keyphrases
  • single layer
  • image segmentation
  • support vector
  • multi layer