Annular-Encapsulation Packaging to Realize High-Performance MEMS Thermal Wind Sensor.
Yizhou YeZhenjun WangZhenxiang YiMing QinQing-An HuangPublished in: NEMS (2018)
Keyphrases
- infrared
- sensor networks
- multi sensor
- electrical power
- high speed
- sensor data
- wind speed
- high density
- high efficiency
- finite element analysis
- power plant
- information integration
- object oriented databases
- wind power
- cost effective
- data sets
- data acquisition
- thermal images
- analog to digital converter
- fiber bragg grating