Login / Signup
An efficient methodology for building macromodels of IC fabrication processes.
K. K. Low
Stephen W. Director
Published in:
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (1989)
Keyphrases
</>
integrated circuit
process model
multiscale
high density
high speed
statistical methods
communication channels
data sets
information systems
multi agent
data structure
design methodology
electron beam