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An effective on-line surface particles inspection instrument for large aperture optical element.

Wendong DingZhengtao ZhangDa-Peng ZhangDe XuHai-Bing LvXin-Xiang MiaoGuorui ZhouHao Liu
Published in: Int. J. Autom. Comput. (2017)
Keyphrases
  • light scattering
  • high quality
  • imaging systems
  • three dimensional
  • closely spaced
  • neural network
  • viewpoint
  • surface model