Discrete Relaxation Method for Triple Patterning Lithography Layout Decomposition.

Xingquan Li Ziran Zhu Wenxing Zhu

Published in: IEEE Trans. Computers (2017)

Keyphrases

electron beam
discrete version
machine learning
integrated circuit
decomposition method
sequence prediction
information retrieval
genetic algorithm
artificial intelligence
computer vision
objective function
lower bound
wavelet packet
translation invariant
discrete space
discrete geometry