Multi-feature sparse-based defect detection and classification in semiconductor units.
Bashar HaddadLina J. KaramJieping YeNital PatelMartin W. BraunPublished in: ICIP (2016)
Keyphrases
- multi feature
- defect detection
- image classification
- feature fusion
- feature extraction
- decision trees
- classification accuracy
- text classification
- feature space
- multi class
- classification algorithm
- classification method
- high dimensionality
- support vector machine
- training set
- feature selection
- recognition rate
- image features
- keypoints
- similarity measure