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Data-Driven Condition-Based Maintenance of Test Handlers in Semiconductor Manufacturing.
Timothy Guan
Ye Chow Kuang
Melanie Po-Leen Ooi
Xiang Gin Cheah
Yeung Shun Tan
Serge N. Demidenko
Published in:
DELTA (2011)
Keyphrases
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data driven
semiconductor manufacturing
discrete event simulation
sufficient conditions
process control
databases
statistical significance
real world
machine learning
multistage
statistical tests
structural equation modeling