Cut mask optimization for multi-patterning directed self-assembly lithography.

Wachirawit Ponghiran Seongbo Shim Youngsoo Shin

Published in: DATE (2017)

Keyphrases

optimization algorithm
global optimization
optimization problems
bi level
discrete optimization
decision making
constrained optimization
database
multi objective
joint optimization
optimization process
video sequences
optimal solution
case study
feature selection
genetic algorithm
neural network