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Surface characterization of epitaxial lateral overgrowth of InP on InP/GaAs substrate by MOCVD.

Jing ZhouXiaomin RenQi WangD. P. XiongHui HuangYongqing Huang
Published in: Microelectron. J. (2007)
Keyphrases
  • film thickness
  • thin film
  • three dimensional
  • room temperature
  • gallium arsenide
  • real time
  • computer vision
  • smooth surfaces
  • surface reconstruction
  • injection lasers