Application of Fast Laser Deprocessing Techniques on large cross-sectional view area sample with FIB-SEM dual beam system.
Yuzhe ZhaoQ. J. WangPik Kee TanH. H. YapBinghai LiuH. FengHao TanRan HeY. M. HuangD. D. WangL. ZhuC. Q. ChenFrancis RivaiJeffery LamZhihong MaiPublished in: Microelectron. Reliab. (2016)