A fast process variation and pattern fidelity aware mask optimization algorithm.

Ahmed Awad Atsushi Takahashi Satoshi Tanaka Chikaaki Kodama

Published in: ICCAD (2014)

Keyphrases

optimization algorithm
multi objective
differential evolution
optimization method
particle swarm optimization pso
artificial bee colony
control system
pattern matching
neural network
fuzzy logic
ant colony optimization
pattern discovery
evolutionary multi objective