Diagnosis in process control by signal and information fusion of field instruments.
Franz MeschPublished in: Elektrotech. Informationstechnik (2009)
Keyphrases
- information fusion
- process control
- multi sensor information fusion
- data fusion
- control system
- information gathering
- fusion algorithm
- decision level
- fault diagnosis
- soft computing
- product quality
- fusion method
- multi source
- semiconductor manufacturing
- high frequency
- fusion model
- fuzzy logic
- manufacturing process
- real time
- control charts
- fuzzy theory