A low power MEMS gas sensor based on nanocrystalline ZnO thin films for sensing methane.
P. BhattacharyyaP. K. BasuBiplob MondalH. SahaPublished in: Microelectron. Reliab. (2008)
Keyphrases
- thin film
- low power
- image sensor
- power consumption
- low cost
- high speed
- genetic algorithm
- high density
- single chip
- high power
- low power consumption
- sensor networks
- wireless transmission
- short circuit
- multi layer
- room temperature
- vlsi circuits
- logic circuits
- analog to digital converter
- grain size
- digital signal processing
- cost effective
- real time
- power reduction
- film thickness
- neural network