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Electron-Beam-Lithographed Nanostructures as Reference Materials for Label-Free Scattered-Light Biosensing of Single Filoviruses.
Anant Agrawal
Joseph Majdi
Kathleen A. Clouse
Tzanko Stantchev
Published in:
Sensors (2018)
Keyphrases
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electron beam
integrated circuit
genetic algorithm
artificial intelligence
image analysis
multi objective
x ray
design parameters
semiconductor devices