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Extraction of 3D parasitic capacitances in 90 nm and 22 nm NAND flash memories.
Jérémy Postel-Pellerin
Frédéric Lalande
Pierre Canet
Rachid Bouchakour
F. Jeuland
B. Bertello
B. Villard
Published in:
Microelectron. Reliab. (2009)
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