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Low-temperature bottom-up integration of carbon nanotubes for vertical interconnects in monolithic 3D integrated circuits.

Sten VollebregtRyoichi IshiharaJohan van der CingelKees Beenakker
Published in: 3DIC (2011)
Keyphrases
  • integrated circuit
  • input output
  • data fusion
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  • database
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  • search engine
  • relational databases
  • electron beam