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OpenILT: An Open Source Inverse Lithography Technique Framework (Invited Paper).

Su ZhengBei YuMartin D. F. Wong
Published in: ASICON (2023)
Keyphrases
  • open source
  • invited paper
  • lightweight
  • databases
  • main contribution
  • theoretical framework
  • conceptual framework
  • database
  • neural network
  • probabilistic model
  • core components
  • electron beam