A multistage mathematical programming based scheduling approach for the photolithography area in semiconductor manufacturing.
Andreas KlemmtJan LangeGerald WeigertFrank LehmannJens SeyfertPublished in: WSC (2010)
Keyphrases
- semiconductor manufacturing
- mathematical programming
- multistage
- production system
- linear programming
- stochastic programming
- process control
- single stage
- robust optimization
- dynamic programming
- scheduling problem
- combinatorial optimization
- mixed integer linear
- queueing theory
- lot sizing
- capacity expansion
- production line
- optimization approaches
- interconnection networks
- production planning
- parallel machines
- stationary points
- cost function
- cell suppression
- machine learning