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Skipping algorithms for defect inspection using a dynamic control strategy in semiconductor manufacturing.
Gloria Luz Rodríguez-Verján
Stéphane Dauzère-Pérès
Sylvain Housseman
Jacques Pinaton
Published in:
WSC (2013)
Keyphrases
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control strategy
semiconductor manufacturing
control system
control strategies
optimal control
control scheme
control algorithm
control method
operating conditions
neural network
learning algorithm
process control
stability analysis