Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators.

Pin-Hsu Kao Po-Jen Shih Ching-Liang Dai Mao-Chen Liu

Published in: Sensors (2010)

Keyphrases

high speed
power consumption
silicon on insulator
low cost
low power
integrated circuit
high density
analog vlsi
electron beam
focal plane
delay insensitive