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Application of nanoindentation technique for investigation of elasto-plastic properties of the selected thin film materials.

Artur WymyslowskiLukasz Dowhan
Published in: Microelectron. Reliab. (2013)
Keyphrases
  • thin film
  • neural network
  • data analysis
  • high density
  • short circuit
  • genetic algorithm
  • association rules
  • shape from shading
  • multi layer