Effect of electron irradiation on morphological, compositional and electrical properties of nanocluster carbon thin films grown using room temperature based cathodic arc process for large area microelectronics.
Shounak DeB. SatyanarayanaGanesh SanjeevK. RamakrishnaK. Mohan RaoManjunatha PattabiPublished in: Microelectron. Reliab. (2014)