High-resolution X-ray computed tomography of through silicon vias for RF MEMS integrated passive device applications.
P. J. de VeenC. BosD. R. HoogstedeC. Th. A. RevenbergJessica LiljeholmThorbjorn EbeforsPublished in: Microelectron. Reliab. (2015)
Keyphrases
- high resolution
- high density
- rfid reader
- radio frequency
- field effect transistors
- low resolution
- image reconstruction
- super resolution
- transmission electron microscopy
- semiconductor devices
- integrated circuit
- metal oxide semiconductor
- high frequency
- multislice
- relevance feedback
- remote sensing
- high speed
- low cost
- high quality
- wearable devices
- image processing
- high resolution images
- sonar images