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Operator Resource modelling in a Multiple wafer Sizes fabrication Environment using discrete Event simulation.

Georg SeidelPatrick PreussAndré NaumannSoo Leen LowChew Wye ChanBoon-Ping Gan
Published in: WSC (2018)
Keyphrases
  • discrete event simulation
  • semiconductor manufacturing
  • integrated circuit
  • discrete event
  • web resources
  • cooperative
  • mobile robot
  • high speed