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Nondestructive measurement of layer structures in dielectric substrates by collimated terahertz time domain spectroscopy.

Yuya TojimaHiroki SudoTakayuki KubotaKeizo ChoHiroaki NakabayashiKoji Suizu
Published in: IEICE Electron. Express (2018)
Keyphrases
  • high density
  • silicon dioxide
  • frequency domain
  • databases
  • x ray
  • infrared
  • multi layer
  • neural network
  • artificial intelligence
  • multiscale
  • data acquisition