Image Processing Techniques for Wafer Defect Cluster Identification.
Chenn-Jung HuangChua-Chin WangChi-Feng WuPublished in: IEEE Des. Test Comput. (2002)
Keyphrases
- clustering algorithm
- automatic identification
- data clustering
- integrated circuit
- semiconductor manufacturing
- cluster analysis
- massively parallel
- data sets
- probabilistic model
- unsupervised learning
- database systems
- document clustering
- computer vision
- artificial intelligence
- subspace clustering
- learning algorithm
- genetic algorithm
- unsupervised clustering
- similar objects
- person identification
- information retrieval